Inventor
MAQUINE JOHANNES
NL2 patents
Patents
2 patentsUS7106420B2Sep 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48
US7394525B2Jul 1, 2008
Exchangeable object handling apparatus, lithographic apparatus including such exchangeable object handling apparatus, and device manufacturing method
ASML NETHERLANDS BV0 citations36