Inventor

OCHIAI KOSHIRO

JP5 patents

Patents

5 patents

US6153349ANov 28, 2000

Photo resist composition

SUMITOMO CHEMICAL CO48 citations91

US6258507B1Jul 10, 2001

Photoresist compositions

SUMITOMO CHEMICAL CO23 citations90

US6777511B2Aug 17, 2004

Process for producing poly (meth) acrylates having reduced metal content

SUMITOMO CHEMICAL CO3 citations60

US6762007B2Jul 13, 2004

Chemical amplification type positive resist composition

SUMITOMO CHEMICAL CO3 citations60

US7144674B2Dec 5, 2006

Positive resist composition

SUMITOMO CHEMICAL CO1 citations49