Inventor
PANDHUMSOPORN TAMARAK
US9 patents
⚠️ This page may combine multiple inventors who share the name “PANDHUMSOPORN TAMARAK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS7459100B2Dec 2, 2008
Methods and apparatus for sequentially alternating among plasma processes in order to optimize a substrate
LAM RES CORP40 citations91
US12087557B2Sep 10, 2024
Substrate processing system including coil with RF powered faraday shield
LAM RES CORP0 citations61
US7351664B2Apr 1, 2008
Methods for minimizing mask undercuts and notches for plasma processing system
LAM RES CORP3 citations59
US7985688B2Jul 26, 2011
Notch stop pulsing process for plasma processing system
LAM RES CORP0 citations40
US10854492B2Dec 1, 2020
Edge ring assembly for improving feature profile tilting at extreme edge of wafer
LAM RES CORP0 citations38
CIT ALCATEL
3 patentsUS6287437B1Sep 11, 2001
Recessed bonding of target for RF diode sputtering
CIT ALCATEL37 citations91
US6132575AOct 17, 2000
Magnetron reactor for providing a high density, inductively coupled plasma source for sputtering metal and dielectric films
CIT ALCATEL52 citations91
US6383938B2May 7, 2002
Method of anisotropic etching of substrates
CIT ALCATEL17 citations83