Inventor
PEACE STEVEN L
US29 patents
⚠️ This page may combine multiple inventors who share the name “PEACE STEVEN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
20 patentsUS6423642B1Jul 23, 2002
Reactor for processing a semiconductor wafer
SEMITOOL INC78 citations96
US6413436B1Jul 2, 2002
Selective treatment of the surface of a microelectronic workpiece
SEMITOOL INC61 citations95
US7102763B2Sep 5, 2006
Methods and apparatus for processing microelectronic workpieces using metrology
SEMITOOL INC22 citations92
US6794291B2Sep 21, 2004
Reactor for processing a semiconductor wafer
SEMITOOL INC13 citations92
US6680253B2Jan 20, 2004
Apparatus for processing a workpiece
SEMITOOL INC31 citations92
US6548411B2Apr 15, 2003
Apparatus and methods for processing a workpiece
SEMITOOL INC37 citations92
US6492284B2Dec 10, 2002
Reactor for processing a workpiece using sonic energy
SEMITOOL INC19 citations92
US7399713B2Jul 15, 2008
Selective treatment of microelectric workpiece surfaces
SEMITOOL INC26 citations91
US6930046B2Aug 16, 2005
Single workpiece processing system
SEMITOOL INC20 citations88
US6893505B2May 17, 2005
Apparatus and method for regulating fluid flows, such as flows of electrochemical processing fluids
SEMITOOL INC17 citations84
US6544391B1Apr 8, 2003
Reactor for electrochemically processing a microelectronic workpiece including improved electrode assembly
SEMITOOL INC14 citations84
US6511914B2Jan 28, 2003
Reactor for processing a workpiece using sonic energy
SEMITOOL INC13 citations84
US6969682B2Nov 29, 2005
Single workpiece processing system
SEMITOOL INC13 citations81
US6806194B2Oct 19, 2004
Apparatus and methods for processing a workpiece
SEMITOOL INC7 citations73
US6692613B2Feb 17, 2004
Reactor for processing a semiconductor wafer
SEMITOOL INC11 citations73
US6447633B1Sep 10, 2002
Reactor for processing a semiconductor wafer
SEMITOOL INC10 citations73
US7909967B2Mar 22, 2011
Electro-chemical processor
SEMITOOL INC0 citations52
US6494984B2Dec 17, 2002
Flat media processing machine
SEMITOOL INC0 citations52
US7935230B2May 3, 2011
Electro-chemical processor
SEMITOOL INC0 citations50
US7927469B2Apr 19, 2011
Electro-chemical processor
SEMITOOL INC0 citations50