Inventor

WOODRUFF DANIEL J

US82 patents

⚠️ This page may combine multiple inventors who share the name “WOODRUFF DANIEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WOODRUFF DANIEL J

SEMITOOL INC

End-effectors and transfer devices for handling microelectronic workpieces

Electroplating apparatus with segmented anode array

Methods and apparatus for processing the surface of a microelectronic workpiece

Reactor vessel having improved cup anode and conductor assembly

Apparatus for electrochemically processing a workpiece including an electrical contact assembly having a seal member

Methods and apparatus for processing the surface of a microelectronic workpiece

Modular semiconductor workpiece processing tool

Semiconductor processing apparatus having lift and tilt mechanism

Processing head for semiconductor processing machines

Semiconductor processing apparatus having linear conveyer system

Modular semiconductor workpiece processing tool

Reactor vessel having improved cup, anode and conductor assembly

Reactor vessel having improved cup, anode, and conductor assembly

Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same

Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same

Methods and apparatus for processing the surface of a microelectronic workpiece

Reactor vessel having improved cup, anode and conductor assembly

Reactor assembly and method of assembly

Semiconductor processing apparatus having lift and tilt mechanism

Semiconductor processing apparatus having lift and tilt mechanism

Reactor vessel having improved cup, anode and conductor assembly

Electroplating reactor including back-side electrical contact apparatus

Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces

Plating system for semiconductor materials

Apparatus for manually and automatically processing microelectronic workpieces

Methods and apparatus for processing the surface of a microelectronic workpiece

Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces

Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces

Apparatus for processing the surface of a microelectronic workpiece

Semiconductor processing apparatus having lift and tilt mechanism

Methods and apparatus for processing the surface of a microelectronic workpiece

Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same

End-effectors for handling microelectronic wafers

Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces

Adaptable electrochemical processing chamber

Dry contact assemblies and plating machines with dry contact assemblies for plating microelectronic workpieces

Electroplating reactor including back-side electrical contact apparatus

Apparatus and method for agitating liquids in wet chemical processing of microfeature workpieces

Apparatus and methods for electrochemical processing of microfeature wafers

EXABYTE CORP

Cartridge rack and library for engaging same

Cartridge rack and library for engaging same

Picker mechanism for data cartridges

Cartridge library and method of operation

Entry-exit port for cartridge library

Cartridge spine and library employing same

Cartridge handling system with moving I/O drive

APPLIED MATERIALS INC

Method and apparatus for post exposure processing of photoresist wafers

Method and apparatus for post exposure processing of photoresist wafers

(unassigned)

Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same

PHILIPS CORP

Cassette for storing, moving and loading optical storage disk cartridges