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Inventor
KWON JUN HYUCK
KR
4 patents
⚠️ This page may combine multiple inventors who share the name “KWON JUN HYUCK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WONIK IPS CO LTD
3 patents
US11784029B2
Oct 10, 2023
Method and apparatus for atomic layer etching
WONIK IPS CO LTD
1 citations
56
US11875998B2
Jan 16, 2024
Substrate processing method
WONIK IPS CO LTD
0 citations
48
US11450531B2
Sep 20, 2022
Atomic layer etching method
WONIK IPS CO LTD
0 citations
48
HANSOL CHEMICAL CO LTD
1 patent
US10490409B2
Nov 26, 2019
Precursor for vapor deposition having excellent thermal stability and preparing method thereof
HANSOL CHEMICAL CO LTD
0 citations
49