Inventor
JIN KWANG SEON
KR6 patents
Patents
6 patentsUS11784029B2Oct 10, 2023
Method and apparatus for atomic layer etching
WONIK IPS CO LTD1 citations56
US12538732B2Jan 27, 2026
Substrate processing apparatus and substrate processing method
WONIK IPS CO LTD0 citations50
US11875998B2Jan 16, 2024
Substrate processing method
WONIK IPS CO LTD0 citations48
US11450531B2Sep 20, 2022
Atomic layer etching method
WONIK IPS CO LTD0 citations48
US10985015B2Apr 20, 2021
Method for preparing composite membrane
WONIK IPS CO LTD0 citations46
US10381217B2Aug 13, 2019
Method of depositing a thin film
WONIK IPS CO LTD0 citations46