Inventor
VAN BERKEL KOOS
NL13 patents
⚠️ This page may combine multiple inventors who share the name “VAN BERKEL KOOS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
12 patentsUS10955595B2Mar 23, 2021
Multilayer reflector, method of manufacturing a multilayer reflector and lithographic apparatus
ASML NETHERLANDS BV5 citations71
US10488765B2Nov 26, 2019
Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus
ASML NETHERLANDS BV2 citations71
US10185224B2Jan 22, 2019
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV3 citations70
US9927722B2Mar 27, 2018
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV2 citations70
US10747127B2Aug 18, 2020
Lithographic apparatus
ASML NETHERLANDS BV5 citations68
US12197139B2Jan 14, 2025
Object holder, tool and method of manufacturing an object holder
ASML NETHERLANDS BV1 citations58
US12235592B2Feb 25, 2025
Object holder, electrostatic sheet and method for making an electrostatic sheet
ASML NETHERLANDS BV0 citations56
US12276918B2Apr 15, 2025
Method and apparatus for calculating a spatial map associated with a component
ASML NETHERLANDS BV0 citations55
US10712673B2Jul 14, 2020
Method of determining a property of a structure, inspection apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US12591178B2Mar 31, 2026
Method for adjusting a patterning process
ASML NETHERLANDS BV0 citations42
US12339592B2Jun 24, 2025
Method for thermo-mechanical control of a heat sensitive element and device for use in a lithographic production process
ASML NETHERLANDS BV0 citations42
US9811001B2Nov 7, 2017
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV0 citations39