Inventor
YAEGASHI KENTA
JP6 patents
Patents
6 patentsUS11366255B2Jun 21, 2022
Concave diffraction grating, method for producing the same, and optical device
HITACHI HIGH TECH CORP0 citations60
US12517289B2Jan 6, 2026
Method for manufacturing concave diffraction grating, and optical device
HITACHI HIGH TECH CORP0 citations50
US12487383B2Dec 2, 2025
Concave diffraction grating and optical device
HITACHI HIGH TECH CORP0 citations50
US12591083B2Mar 31, 2026
Method for manufacturing diffraction grating and method for manufacturing replica grating
HITACHI HIGH TECH CORP0 citations48
US11391871B2Jul 19, 2022
Manufacturing method of concave diffraction grating, concave diffraction grating, and analyzer using the same
HITACHI HIGH TECH CORP0 citations48
US12360298B2Jul 15, 2025
Diffraction grating, method for manufacturing diffraction grating, and photomask
HITACHI HIGH TECH CORP0 citations47