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Inventor
TAKANE EIJI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “TAKANE EIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
2 patents
US5408083A
Apr 18, 1995
Method of measuring the best focus position having a plurality of measuring mark images and a plurality of focus positions
NIKON CORP
36 citations
90
US5475490A
Dec 12, 1995
Method of measuring a leveling plane
NIKON CORP
13 citations
71
NIKON CORPORATON
1 patent
US5525808A
Jun 11, 1996
Alignment method and alignment apparatus with a statistic calculation using a plurality of weighted coordinate positions
NIKON CORPORATON
205 citations
95