Inventor
FUKAYA KOICHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “FUKAYA KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
18 patentsUS7357699B2Apr 15, 2008
Substrate holding apparatus and polishing apparatus
EBARA CORP49 citations96
US7670206B2Mar 2, 2010
Substrate polishing apparatus and substrate polishing method
EBARA CORP27 citations92
US7988537B2Aug 2, 2011
Substrate holding apparatus and polishing apparatus
EBARA CORP8 citations84
US7867063B2Jan 11, 2011
Substrate holding apparatus and polishing apparatus
EBARA CORP8 citations84
US7854646B2Dec 21, 2010
Substrate polishing apparatus and substrate polishing method
EBARA CORP12 citations84
US7635292B2Dec 22, 2009
Substrate holding device and polishing apparatus
EBARA CORP13 citations84
US7108592B2Sep 19, 2006
Substrate holding apparatus and polishing apparatus
EBARA CORP14 citations84
US10008380B2Jun 26, 2018
Substrate drying apparatus, substrate drying method and control program
EBARA CORP7 citations83
US8769842B2Jul 8, 2014
Substrate drying apparatus, substrate drying method and control program
EBARA CORP5 citations72
US10991602B2Apr 27, 2021
Substrate washing device
EBARA CORP1 citations62
US7638030B2Dec 29, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP3 citations62
US12205831B2Jan 21, 2025
Cleaning apparatus and polishing apparatus
EBARA CORP0 citations61
US11948811B2Apr 2, 2024
Cleaning apparatus and polishing apparatus
EBARA CORP0 citations61
US11094548B2Aug 17, 2021
Apparatus for cleaning substrate and substrate cleaning method
EBARA CORP1 citations61
US12220732B2Feb 11, 2025
Substrate cleaning system and substrate cleaning method
EBARA CORP0 citations52
US12370578B2Jul 29, 2025
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP0 citations51
US12100587B2Sep 24, 2024
Substrate cleaning apparatus and cleaning method of substrate
EBARA CORP0 citations50
US12569891B2Mar 10, 2026
Substrate processing device, polishing device, and substrate processing method
EBARA CORP0 citations47