Inventor
GOLDBERG BORIS
IL14 patents
⚠️ This page may combine multiple inventors who share the name “GOLDBERG BORIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS6882417B2Apr 19, 2005
Method and system for detecting defects
APPLIED MATERIALS INC25 citations92
US6853446B1Feb 8, 2005
Variable angle illumination wafer inspection system
APPLIED MATERIALS INC52 citations92
US6788445B2Sep 7, 2004
Multi-beam polygon scanning system
APPLIED MATERIALS INC48 citations92
US6657714B2Dec 2, 2003
Defect detection with enhanced dynamic range
APPLIED MATERIALS INC43 citations92
US6366352B1Apr 2, 2002
Optical inspection method and apparatus utilizing a variable angle design
APPLIED MATERIALS INC32 citations92
US6914670B1Jul 5, 2005
Defect detection with enhanced dynamic range
APPLIED MATERIALS INC7 citations74
US7460221B2Dec 2, 2008
Method and system for detecting defects
APPLIED MATERIALS INC5 citations73
US7173694B2Feb 6, 2007
Method and system for detecting defects
APPLIED MATERIALS INC9 citations73
US7053999B2May 30, 2006
Method and system for detecting defects
APPLIED MATERIALS INC10 citations73
US7268343B2Sep 11, 2007
Method and system for detecting defects
APPLIED MATERIALS INC3 citations62