Inventor
TAKEYAMA TERUSHIGE
JP4 patents
Patents
4 patentsUS6561343B2May 13, 2003
Magnetic carrying device
ANELVA CORP25 citations90
US6319373B2Nov 20, 2001
Substrate transfer apparatus of substrate processing system
ANELVA CORP25 citations90
US6461484B2Oct 8, 2002
Sputtering device
ANELVA CORP18 citations78
US6660089B2Dec 9, 2003
Substrate support mechanism and substrate rotation device
ANELVA CORP12 citations71