Inventor
LI XIAO-MIN
JP6 patents
Patents
6 patentsUS6204525B1Mar 20, 2001
Ferroelectric thin film device and method of producing the same
MURATA MANUFACTURING CO41 citations91
US6050217AApr 18, 2000
Parallel plate plasma CVD apparatus
MURATA MANUFACTURING CO21 citations89
US6667182B2Dec 23, 2003
Method for making ferroelectric thin-film, sensor and the ferroelectric thin-film element
MURATA MANUFACTURING CO7 citations72
US6613585B2Sep 2, 2003
Ferroelectric thin film device and method of producing the same
MURATA MANUFACTURING CO6 citations72
US6198120B1Mar 6, 2001
Ferroelectric thin film device and method of producing the same
MURATA MANUFACTURING CO10 citations72
US6465825B2Oct 15, 2002
Thin film multilayered structure, ferroelectric thin film element, and manufacturing method of the same
MURATA MANUFACTURING CO0 citations49