Inventor
KOJIMA SHUNICHIRO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “KOJIMA SHUNICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
13 patentsUS6899592B1May 31, 2005
Polishing apparatus and dressing method for polishing tool
EBARA CORP72 citations96
US6852019B2Feb 8, 2005
Substrate holding apparatus
EBARA CORP49 citations96
US6435949B1Aug 20, 2002
Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof
EBARA CORP71 citations96
US6050884AApr 18, 2000
Polishing apparatus
EBARA CORP57 citations96
US7083507B2Aug 1, 2006
Substrate holding apparatus
EBARA CORP14 citations92
US5934984AAug 10, 1999
Polishing apparatus
EBARA CORP36 citations92
US6293858B1Sep 25, 2001
Polishing device
EBARA CORP21 citations91
US7491117B2Feb 17, 2009
Substrate holding apparatus
EBARA CORP11 citations84
US6899604B2May 31, 2005
Dressing apparatus and polishing apparatus
EBARA CORP17 citations84
US6409582B1Jun 25, 2002
Polishing apparatus
EBARA CORP14 citations84
US6241592B1Jun 5, 2001
Polishing apparatus
EBARA CORP15 citations84
US7850509B2Dec 14, 2010
Substrate holding apparatus
EBARA CORP5 citations73
US7156725B2Jan 2, 2007
Substrate polishing machine
EBARA CORP7 citations73