P

Inventor

SAKURAI KUNIHIKO

JP53 patents
⚠️ This page may combine multiple inventors who share the name “SAKURAI KUNIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

37 patents
US5830045ANov 3, 1998

Polishing apparatus

EBARA CORP95 citations97
US6878044B2Apr 12, 2005

Polishing apparatus

EBARA CORP47 citations96
US6852019B2Feb 8, 2005

Substrate holding apparatus

EBARA CORP49 citations96
US6358128B1Mar 19, 2002

Polishing apparatus

EBARA CORP61 citations96
US6332826B1Dec 25, 2001

Polishing apparatus

EBARA CORP34 citations96
US5860847AJan 19, 1999

Polishing apparatus

EBARA CORP63 citations96
US5839947ANov 24, 1998

Polishing apparatus

EBARA CORP58 citations96
US5643067AJul 1, 1997

Dressing apparatus and method

EBARA CORP87 citations96
US7150673B2Dec 19, 2006

Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus

EBARA CORP15 citations93
US6953390B2Oct 11, 2005

Polishing apparatus

EBARA CORP30 citations93
US6578891B1Jun 17, 2003

Substrate holder and substrate transfer apparatus using the same

EBARA CORP49 citations93
US5647792AJul 15, 1997

Polishing apparatus

EBARA CORP23 citations93
US7632378B2Dec 15, 2009

Polishing apparatus

EBARA CORP15 citations92
US7311585B2Dec 25, 2007

Substrate holding apparatus and polishing apparatus

EBARA CORP15 citations92
US7101255B2Sep 5, 2006

Polishing apparatus

EBARA CORP15 citations92
US7083507B2Aug 1, 2006

Substrate holding apparatus

EBARA CORP14 citations92
US7033260B2Apr 25, 2006

Substrate holding device and polishing device

EBARA CORP20 citations92
US6918814B2Jul 19, 2005

Polishing apparatus

EBARA CORP15 citations92
US6682408B2Jan 27, 2004

Polishing apparatus

EBARA CORP21 citations92
US6413146B1Jul 2, 2002

Polishing apparatus

EBARA CORP17 citations92
US6354922B1Mar 12, 2002

Polishing apparatus

EBARA CORP50 citations92
US6283822B1Sep 4, 2001

Polishing apparatus

EBARA CORP19 citations92
US5893794AApr 13, 1999

Polishing apparatus having robotic transport apparatus

EBARA CORP25 citations92
US7632173B2Dec 15, 2009

Substrate holding apparatus and polishing apparatus

EBARA CORP11 citations84
US7491117B2Feb 17, 2009

Substrate holding apparatus

EBARA CORP11 citations84
US7234999B2Jun 26, 2007

Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus

EBARA CORP12 citations84
US6358131B1Mar 19, 2002

Polishing apparatus

EBARA CORP17 citations84
US7163895B2Jan 16, 2007

Polishing method

EBARA CORP9 citations74
US6402597B1Jun 11, 2002

Polishing apparatus and method

EBARA CORP12 citations74
US5961380AOct 5, 1999

Robotic transport apparatus

EBARA CORP7 citations74
US7850509B2Dec 14, 2010

Substrate holding apparatus

EBARA CORP5 citations73
US7156725B2Jan 2, 2007

Substrate polishing machine

EBARA CORP7 citations73
US6942541B2Sep 13, 2005

Polishing apparatus

EBARA CORP9 citations73
US7361076B2Apr 22, 2008

Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus

EBARA CORP4 citations63
US7156719B2Jan 2, 2007

Polishing apparatus

EBARA CORP2 citations62
US7270594B2Sep 18, 2007

Polishing apparatus

EBARA CORP0 citations52
US6227954B1May 8, 2001

Polishing apparatus

EBARA CORP1 citations52

SAKURAI KUNIHIKO

7 patents

BROTHER IND LTD

3 patents

EBARA TECH INC

1 patent

HATTORI HIROSHI

1 patent

MIZUTANI NORIO

1 patent

Showing the top 50 of 53 patents by PatentIndex Score.