Inventor
TAKAYANAGI HIDEKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “TAKAYANAGI HIDEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
8 patentsUS6852019B2Feb 8, 2005
Substrate holding apparatus
EBARA CORP49 citations96
US7083507B2Aug 1, 2006
Substrate holding apparatus
EBARA CORP14 citations92
US7491117B2Feb 17, 2009
Substrate holding apparatus
EBARA CORP11 citations84
US7850509B2Dec 14, 2010
Substrate holding apparatus
EBARA CORP5 citations73
US7156725B2Jan 2, 2007
Substrate polishing machine
EBARA CORP7 citations73
US11604150B2Mar 14, 2023
Device for measuring bump height, apparatus for processing substrate, method of measuring bump height, and storage medium
EBARA CORP2 citations70
US11230789B2Jan 25, 2022
Method of removing liquid from seal of a substrate holder
EBARA CORP0 citations62
US11535949B2Dec 27, 2022
Substrate holder and plating apparatus
EBARA CORP0 citations52