Inventor

NUMAJIRI KENJI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “NUMAJIRI KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ANELVA CORP

1 patent

US5304405AApr 19, 1994

Thin film deposition method and apparatus

ANELVA CORP28 citations90

CANON ANELVA CORP

1 patent

US7807553B2Oct 5, 2010

Substrate heating apparatus and semiconductor fabrication method

CANON ANELVA CORP7 citations71

KUMAGAI AKIRA

1 patent

US8150243B2Apr 3, 2012

Heating process apparatus

KUMAGAI AKIRA3 citations60