P

Inventor

MATSUNAGA MASANOBU

JP8 patents
⚠️ This page may combine multiple inventors who share the name “MATSUNAGA MASANOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUNAGA MASANOBU

3 patents
US8257789B2Sep 4, 2012

Film formation method in vertical batch CVD apparatus

MATSUNAGA MASANOBU81 citations96
US8563096B2Oct 22, 2013

Vertical film formation apparatus and method for using same

MATSUNAGA MASANOBU31 citations91
US8216648B2Jul 10, 2012

Film formation method and apparatus

MATSUNAGA MASANOBU6 citations72

NODERA NOBUTAKE

2 patents
US8178448B2May 15, 2012

Film formation method and apparatus for semiconductor process

NODERA NOBUTAKE82 citations94
US8080477B2Dec 20, 2011

Film formation apparatus and method for using same

NODERA NOBUTAKE6 citations61

YANG LIU

1 patent
US8298628B2Oct 30, 2012

Low temperature deposition of silicon-containing films

YANG LIU58 citations97

HASEBE KAZUHIDE

1 patent
US8080290B2Dec 20, 2011

Film formation method and apparatus for semiconductor process

HASEBE KAZUHIDE109 citations97

TOKYO ELECTRON LTD

1 patent
US12488991B2Dec 2, 2025

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations62