Inventor

PARK SANG-WUK

KR4 patents

⚠️ This page may combine multiple inventors who share the name “PARK SANG-WUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PARK SANG-WUK

2 patents

US8872059B2Oct 28, 2014

Etching system and method of controlling etching process condition

PARK SANG-WUK1 citations46

US8304264B2Nov 6, 2012

Apparatus and method for monitoring chamber status in semiconductor fabrication process

PARK SANG-WUK0 citations36

KIM HYUK

1 patent

US9349747B2May 24, 2016

Semiconductor devices having gate stack portions that extend in a zigzag pattern

KIM HYUK7 citations81

PARK SANG WUK

1 patent

US10192881B2Jan 29, 2019

Semiconductor device

PARK SANG WUK0 citations37