Inventor

CHUNG SUNG IL

KR4 patents

⚠️ This page may combine multiple inventors who share the name “CHUNG SUNG IL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHUNG SUNG IL

2 patents

US9190239B2Nov 17, 2015

Plasma immersion ion milling apparatus and method

CHUNG SUNG IL11 citations75

US8591711B2Nov 26, 2013

Method and chamber for inductively coupled plasma processing for cylinderical material with three-dimensional surface

CHUNG SUNG IL0 citations39

KOREA ELECTROTECH RES INST

1 patent

US8354908B2Jan 15, 2013

Cylindrical magnetic levitation stage

KOREA ELECTROTECH RES INST5 citations68

JEON JEONG WOO

1 patent

US8964167B2Feb 24, 2015

Cylindrical magnetic levitation stage and lithography

JEON JEONG WOO1 citations38