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Inventor
NIKIFOROV S A
KR
2 patents
⚠️ This page may combine multiple inventors who share the name “NIKIFOROV S A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHUNG SUNG IL
1 patent
US9190239B2
Nov 17, 2015
Plasma immersion ion milling apparatus and method
CHUNG SUNG IL
11 citations
75
KOREA ELECTROTECH RES INST
1 patent
US8354908B2
Jan 15, 2013
Cylindrical magnetic levitation stage
KOREA ELECTROTECH RES INST
5 citations
68