Inventor

STAICU ADRIAN

DE2 patents

⚠️ This page may combine multiple inventors who share the name “STAICU ADRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STAICU ADRIAN

1 patent

US8717541B2May 6, 2014

Field facet mirror for an illumination optics of a projection exposure apparatus for EUV microlithography

STAICU ADRIAN4 citations62

ZEISS CARL SMT GMBH

1 patent

US9304406B2Apr 5, 2016

Field facet mirror for an illumination optics of a projection exposure apparatus for EUV microlithography

ZEISS CARL SMT GMBH0 citations46