Inventor

SMITH SHAUN T

US2 patents

Patents

2 patents

US9736920B2Aug 15, 2017

Apparatus and method for plasma ignition with a self-resonating device

MKS INSTR INC12 citations81

US10076020B2Sep 11, 2018

Apparatus and method for plasma ignition with a self-resonating device

MKS INSTR INC2 citations70