Inventor
LIU HSIAO-PING
TW4 patents
Patents
4 patentsUS10153203B2Dec 11, 2018
Methods for forming metal layers in openings and apparatus for forming same
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations79
US10163719B2Dec 25, 2018
Method of forming self-alignment contact
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10050116B2Aug 14, 2018
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9818834B2Nov 14, 2017
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations50