Inventor
EILON MICHAL
IL5 patents
Patents
5 patentsUS10217621B2Feb 26, 2019
Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber
APPLIED MATERIALS ISRAEL LTD8 citations79
US11049704B1Jun 29, 2021
Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber
APPLIED MATERIALS ISRAEL LTD3 citations66
US12480898B2Nov 25, 2025
Z-profiling of wafers based on X-ray measurements
APPLIED MATERIALS ISRAEL LTD1 citations59
US10910204B2Feb 2, 2021
Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber
APPLIED MATERIALS ISRAEL LTD0 citations47
US8361814B2Jan 29, 2013
Method for monitoring chamber cleanliness
APPLIED MATERIALS ISRAEL LTD0 citations39