Inventor

SEO TAKEHITO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “SEO TAKEHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAWAUE AKIYA

1 patent

US8227169B2Jul 24, 2012

Compound, acid generator, resist composition, and method of forming resist pattern

KAWAUE AKIYA2 citations60

TOKYO OHKA KOGYO CO LTD

1 patent

US11029600B2Jun 8, 2021

Resist composition and method of forming resist pattern

TOKYO OHKA KOGYO CO LTD0 citations43