Inventor
HAYMORE SCOTT
GB11 patents
Patents
11 patentsUS10900114B2Jan 26, 2021
Method and apparatus for depositing a material
SPTS TECHNOLOGIES LTD3 citations69
US11718908B2Aug 8, 2023
DC magnetron sputtering
SPTS TECHNOLOGIES LTD0 citations59
US11875980B2Jan 16, 2024
Method and apparatus for depositing a material
SPTS TECHNOLOGIES LTD0 citations58
US11961722B2Apr 16, 2024
Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition
SPTS TECHNOLOGIES LTD0 citations57
US11913109B2Feb 27, 2024
Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour deposition
SPTS TECHNOLOGIES LTD1 citations57
US11521840B2Dec 6, 2022
Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition
SPTS TECHNOLOGIES LTD0 citations57
US11008651B2May 18, 2021
DC magnetron sputtering
SPTS TECHNOLOGIES LTD0 citations56
US10601388B2Mar 24, 2020
Method of deposition
SPTS TECHNOLOGIES LTD1 citations56
US12043891B2Jul 23, 2024
Deposition method of a metallic layer on a substrate of a resonator device
SPTS TECHNOLOGIES LTD0 citations49
US12565698B2Mar 3, 2026
Method of operating a PVD apparatus
SPTS TECHNOLOGIES LTD0 citations47
US12207556B2Jan 21, 2025
Method of deposition
SPTS TECHNOLOGIES LTD0 citations47