Inventor
SAITO AYUMU
JP4 patents
⚠️ This page may combine multiple inventors who share the name “SAITO AYUMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
YUYAMA MFG CO LTD
2 patentsEBARA CORP
2 patentsUS11911868B2Feb 27, 2024
Substrate processing apparatus, substrate processing method, and storage medium that stores program to cause computer in substrate processing apparatus to execute substrate processing method
EBARA CORP0 citations59
US12403507B2Sep 2, 2025
Transfer apparatus, cleaning module, and substrate processing apparatus
EBARA CORP0 citations53