Inventor

YU SANG-YONG

KR3 patents

⚠️ This page may combine multiple inventors who share the name “YU SANG-YONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

2 patents

US7369254B2May 6, 2008

System and method for measuring dimension of patterns formed on photomask

SAMSUNG ELECTRONICS CO LTD3 citations60

US9229327B2Jan 5, 2016

Electron beam exposure apparatus and method of detecting error using the same

SAMSUNG ELECTRONICS CO LTD0 citations48

YU SANG-YONG

1 patent

US8304173B2Nov 6, 2012

Photomasks, methods of exposing a substrate to light, methods of forming a pattern, and methods of manufacturing a semiconductor device

YU SANG-YONG0 citations26