Inventor
MOON SEONG-YONG
KR8 patents
Patents
8 patentsUS5741613AApr 21, 1998
Methods of forming half-tone phase-shift masks with reduced susceptiblity to parasitic sputtering
SAMSUNG ELECTRONICS CO LTD44 citations91
US5853921ADec 29, 1998
Methods of fabricating phase shift masks by controlling exposure doses
SAMSUNG ELECTRONICS CO LTD15 citations72
US6566275B1May 20, 2003
Spinner apparatus with chemical supply nozzle and methods of forming patterns and performing etching using the same
SAMSUNG ELECTRONICS CO LTD11 citations71
US6296975B1Oct 2, 2001
Photo mask of semiconductor device and method for manufacturing the same
SAMSUNG ELECTRONICS CO LTD7 citations71
US5804338ASep 8, 1998
Photolithography masks including phase-shifting layers and related methods and structures
SAMSUNG ELECTRONICS CO LTD7 citations71
US7560198B2Jul 14, 2009
Photo-mask having exposure blocking region and methods of designing and fabricating the same
SAMSUNG ELECTRONICS CO LTD6 citations61
US7369254B2May 6, 2008
System and method for measuring dimension of patterns formed on photomask
SAMSUNG ELECTRONICS CO LTD3 citations60
US9229327B2Jan 5, 2016
Electron beam exposure apparatus and method of detecting error using the same
SAMSUNG ELECTRONICS CO LTD0 citations48