P

Inventor

VERHAGEN MARTINUS CORNELIS MARIA

NL41 patents
⚠️ This page may combine multiple inventors who share the name “VERHAGEN MARTINUS CORNELIS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

26 patents
US7733459B2Jun 8, 2010

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV66 citations97
US7701550B2Apr 20, 2010

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV45 citations96
US7602470B2Oct 13, 2009

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV20 citations95
US8031325B2Oct 4, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV13 citations92
US7804575B2Sep 28, 2010

Lithographic apparatus and device manufacturing method having liquid evaporation control

ASML NETHERLANDS BV23 citations92
US9581914B2Feb 28, 2017

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV5 citations84
US9488923B2Nov 8, 2016

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV4 citations84
US9436097B2Sep 6, 2016

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations84
US7751027B2Jul 6, 2010

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV18 citations82
US8018573B2Sep 13, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV6 citations74
US10248033B2Apr 2, 2019

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations73
US11378893B2Jul 5, 2022

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV1 citations72
US9411238B2Aug 9, 2016

Source-collector device, lithographic apparatus, and device manufacturing method

ASML NETHERLANDS BV4 citations72
US7428038B2Sep 23, 2008

Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid

ASML NETHERLANDS BV8 citations72
US7914687B2Mar 29, 2011

Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations63
US10705439B2Jul 7, 2020

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations62
US9753380B2Sep 5, 2017

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations62
US8004652B2Aug 23, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations62
US9746788B2Aug 29, 2017

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations58
US10599054B2Mar 24, 2020

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations52
US10331047B2Jun 25, 2019

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations52
US9904185B2Feb 27, 2018

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations52
US9507278B2Nov 29, 2016

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations52
US8045137B2Oct 25, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations52
US10254663B2Apr 9, 2019

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV0 citations51

DIERICHS MARCEL MATHIJS THEODORE MARIE

3 patents
US9025127B2May 5, 2015

Lithographic apparatus and device manufacturing method

DIERICHS MARCEL MATHIJS THEODORE MARIE6 citations83
US8953144B2Feb 10, 2015

Lithographic apparatus and device manufacturing method

DIERICHS MARCEL MATHIJS THEODORE MARIE6 citations83
US8629971B2Jan 14, 2014

Lithographic apparatus and device manufacturing method

DIERICHS MARCEL MATHIJS THEODORE MARIE9 citations83

VERHAGEN MARTINUS CORNELIS MARIA

3 patents
US8246838B2Aug 21, 2012

Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method

VERHAGEN MARTINUS CORNELIS MARIA1 citations61
US8107053B2Jan 31, 2012

Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid

VERHAGEN MARTINUS CORNELIS MARIA3 citations59
US8958051B2Feb 17, 2015

Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid

VERHAGEN MARTINUS CORNELIS MARIA0 citations47

KEMPER NICOLAAS RUDOLF

2 patents
US8446563B2May 21, 2013

Lithographic apparatus and device manufacturing method

KEMPER NICOLAAS RUDOLF6 citations83
US8755028B2Jun 17, 2014

Lithographic apparatus and device manufacturing method

KEMPER NICOLAAS RUDOLF0 citations62

CADEE THEODORUS PETRUS MARIA

2 patents
US9268242B2Feb 23, 2016

Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor

CADEE THEODORUS PETRUS MARIA4 citations82
US9188880B2Nov 17, 2015

Lithographic apparatus and device manufacturing method involving a heater

CADEE THEODORUS PETRUS MARIA4 citations82

MERTENS JEROEN JOHANNES SOPHIA MARIA

1 patent
US8934082B2Jan 13, 2015

Lithographic apparatus and device manufacturing method

MERTENS JEROEN JOHANNES SOPHIA MARIA5 citations82

JACOBS JOHANNES HENRICUS WILHELMUS

1 patent
US9268236B2Feb 23, 2016

Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder

JACOBS JOHANNES HENRICUS WILHELMUS5 citations81

DONDERS SJOERD NICOLAAS LAMBERTUS

1 patent
US8610089B2Dec 17, 2013

Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning method

DONDERS SJOERD NICOLAAS LAMBERTUS13 citations79

STAVENGA MARCO KOERT

1 patent
US8902404B2Dec 2, 2014

Lithographic apparatus and device manufacturing method

STAVENGA MARCO KOERT0 citations51

MARTENS ARJAN HUBRECHT JOSEF ANNA

1 patent
US8508711B2Aug 13, 2013

Lithographic apparatus and device manufacturing method

MARTENS ARJAN HUBRECHT JOSEF ANNA0 citations43