P

Inventor

JACOBS JOHANNES HENRICUS WILHELMUS

NL81 patents
⚠️ This page may combine multiple inventors who share the name “JACOBS JOHANNES HENRICUS WILHELMUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

30 patents
US7733459B2Jun 8, 2010

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV66 citations97
US7652746B2Jan 26, 2010

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV22 citations93
US7804575B2Sep 28, 2010

Lithographic apparatus and device manufacturing method having liquid evaporation control

ASML NETHERLANDS BV23 citations92
US9857695B2Jan 2, 2018

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations84
US9581914B2Feb 28, 2017

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV5 citations84
US9785055B2Oct 10, 2017

Object holder and lithographic apparatus

ASML NETHERLANDS BV7 citations83
US9507275B2Nov 29, 2016

Support apparatus, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV10 citations83
US7751027B2Jul 6, 2010

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV18 citations82
US11340532B2May 24, 2022

Prolonging optical element lifetime in an EUV lithography system

ASML NETHERLANDS BV5 citations79
US8018573B2Sep 13, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV6 citations74
US10495984B2Dec 3, 2019

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations73
US10209629B2Feb 19, 2019

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations73
US11378893B2Jul 5, 2022

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV2 citations72
US11281115B2Mar 22, 2022

Lithographic apparatus and method

ASML NETHERLANDS BV1 citations72
US10838310B2Nov 17, 2020

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV1 citations72
US10747125B2Aug 18, 2020

Support apparatus, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations72
US10120292B2Nov 6, 2018

Support apparatus, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations72
US9915877B2Mar 13, 2018

Object holder and lithographic apparatus

ASML NETHERLANDS BV3 citations72
US9696638B2Jul 4, 2017

Lithographic apparatus

ASML NETHERLANDS BV3 citations72
US7428038B2Sep 23, 2008

Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid

ASML NETHERLANDS BV8 citations72
US10520837B2Dec 31, 2019

Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations71
US8003968B2Aug 23, 2011

Lithographic apparatus and substrate edge seal

ASML NETHERLANDS BV3 citations63
US7924403B2Apr 12, 2011

Lithographic apparatus and device and device manufacturing method

ASML NETHERLANDS BV3 citations63
US7914687B2Mar 29, 2011

Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations63
US7746447B2Jun 29, 2010

Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatus

ASML NETHERLANDS BV2 citations63
US7684012B2Mar 23, 2010

Lithographic device, device manufacturing method and device manufactured thereby

ASML NETHERLANDS BV2 citations62
US12204255B2Jan 21, 2025

Lithographic apparatus and method

ASML NETHERLANDS BV0 citations61
US11630399B2Apr 18, 2023

Lithographic apparatus and method

ASML NETHERLANDS BV0 citations61
US11300890B2Apr 12, 2022

Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations61
US7502095B2Mar 10, 2009

Lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV3 citations61

DIERICHS MARCEL MATHIJS THEODORE MARIE

3 patents
US9025127B2May 5, 2015

Lithographic apparatus and device manufacturing method

DIERICHS MARCEL MATHIJS THEODORE MARIE6 citations83
US8953144B2Feb 10, 2015

Lithographic apparatus and device manufacturing method

DIERICHS MARCEL MATHIJS THEODORE MARIE6 citations83
US8629971B2Jan 14, 2014

Lithographic apparatus and device manufacturing method

DIERICHS MARCEL MATHIJS THEODORE MARIE9 citations83

JACOBS JOHANNES HENRICUS WILHELMUS

2 patents
US8564763B2Oct 22, 2013

Lithographic apparatus and method

JACOBS JOHANNES HENRICUS WILHELMUS32 citations88
US9268236B2Feb 23, 2016

Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder

JACOBS JOHANNES HENRICUS WILHELMUS5 citations81

CADEE THEODORUS PETRUS MARIA

2 patents
US9268242B2Feb 23, 2016

Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor

CADEE THEODORUS PETRUS MARIA4 citations82
US9188880B2Nov 17, 2015

Lithographic apparatus and device manufacturing method involving a heater

CADEE THEODORUS PETRUS MARIA4 citations82

TEN KATE NICOLAAS

2 patents
US10551752B2Feb 4, 2020

Lithographic apparatus and method

TEN KATE NICOLAAS1 citations71
US9632435B2Apr 25, 2017

Lithographic apparatus and method

TEN KATE NICOLAAS2 citations71

VAN DE KERKHOF MARCUS ADRIANUS

1 patent
US9482967B2Nov 1, 2016

Lithographic apparatus, control system and device manufacturing method

VAN DE KERKHOF MARCUS ADRIANUS6 citations83

VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS

1 patent
US8570492B2Oct 29, 2013

Lithographic apparatus

VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS6 citations82

WATSO ROBERT DOUGLAS

1 patent
US8823918B2Sep 2, 2014

Lithographic apparatus and a method of operating the apparatus

WATSO ROBERT DOUGLAS7 citations76

KUNNEN JOHAN GERTRUDIS CORNELIS

1 patent
US9280063B2Mar 8, 2016

Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method

KUNNEN JOHAN GERTRUDIS CORNELIS3 citations71

COMPEN RENE THEODORUS PETRUS

1 patent
US9013682B2Apr 21, 2015

Clamping device and object loading method

COMPEN RENE THEODORUS PETRUS5 citations71

PATEL HRISHIKESH

1 patent
US8472003B2Jun 25, 2013

Fluid handling structure, lithographic apparatus and device manufacturing method

PATEL HRISHIKESH5 citations67

DE JONG FREDERIK EDUARD

1 patent
US8514365B2Aug 20, 2013

Lithographic apparatus and device manufacturing method

DE JONG FREDERIK EDUARD5 citations65

LEXMOND AXEL SEBASTIAAN

1 patent
US8982316B2Mar 17, 2015

Lithographic apparatus, a metrology apparatus and a method of using the apparatus

LEXMOND AXEL SEBASTIAAN5 citations64

BECKERS MARCEL

1 patent
US8976334B2Mar 10, 2015

Lithographic apparatus and device manufacturing method

BECKERS MARCEL1 citations61

VERHAGEN MARTINUS CORNELIS MARIA

1 patent
US8246838B2Aug 21, 2012

Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method

VERHAGEN MARTINUS CORNELIS MARIA1 citations61

OTTENS JOOST JEROEN

1 patent
US8232540B2Jul 31, 2012

Lithographic apparatus and substrate edge seal

OTTENS JOOST JEROEN3 citations61

Showing the top 50 of 81 patents by PatentIndex Score.