Inventor
TEUNISSEN FRANCISCUS JOHANNES
NL6 patents
Patents
6 patentsUS7701550B2Apr 20, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations96
US7602470B2Oct 13, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations95
US7428038B2Sep 23, 2008
Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid
ASML NETHERLANDS BV8 citations72
US7148949B2Dec 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7291850B2Nov 6, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations55
US7582881B2Sep 1, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations45