Inventor

BENISCHEK JURGEN

NL3 patents

⚠️ This page may combine multiple inventors who share the name “BENISCHEK JURGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VERHAGEN MARTINUS CORNELIS MARIA

2 patents

US8107053B2Jan 31, 2012

Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid

VERHAGEN MARTINUS CORNELIS MARIA3 citations59

US8958051B2Feb 17, 2015

Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid

VERHAGEN MARTINUS CORNELIS MARIA0 citations47

ASML NETHERLANDS BV

1 patent

US7428038B2Sep 23, 2008

Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid

ASML NETHERLANDS BV8 citations72