Inventor
HYLAND SANDRA
US6 patents
⚠️ This page may combine multiple inventors who share the name “HYLAND SANDRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7226868B2Jun 5, 2007
Method of etching high aspect ratio features
TOKYO ELECTRON LTD45 citations91
US7461614B2Dec 9, 2008
Method and apparatus for improved baffle plate
TOKYO ELECTRON LTD16 citations83
US7723237B2May 25, 2010
Method for selective removal of damaged multi-stack bilayer films
TOKYO ELECTRON LTD12 citations82
US7432191B1Oct 7, 2008
Method of forming a dual damascene structure utilizing a developable anti-reflective coating
TOKYO ELECTRON LTD18 citations78