Inventor

MILLER ADAM Q

US5 patents

⚠️ This page may combine multiple inventors who share the name “MILLER ADAM Q”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SILICON VALLEY GROUP THERMAL

1 patent

US6200389B1Mar 13, 2001

Single body injector and deposition chamber

SILICON VALLEY GROUP THERMAL156 citations96

ASML US INC

1 patent

US6521048B2Feb 18, 2003

Single body injector and deposition chamber

ASML US INC71 citations94

SEMICONDUCTOR EQUIPMENT GROUP

1 patent

US6022414AFeb 8, 2000

Single body injector and method for delivering gases to a surface

SEMICONDUCTOR EQUIPMENT GROUP76 citations93

WATKINS JOHNSON CO

1 patent

US5683516ANov 4, 1997

Single body injector and method for delivering gases to a surface

WATKINS JOHNSON CO67 citations93

WJ SEMICONDUCTOR EQUIPMENT GRO

1 patent

US5935647AAug 10, 1999

Method of manufacturing an injector for chemical vapor deposition processing

WJ SEMICONDUCTOR EQUIPMENT GRO20 citations89