Inventor

GOCHBERG LAWRENCE A

US3 patents

Patents

3 patents

US6602346B1Aug 5, 2003

Gas-purged vacuum valve

NOVELLUS SYSTEMS INC56 citations93

US7754014B2Jul 13, 2010

Gas-purged vacuum valve

NOVELLUS SYSTEMS INC5 citations71

US7585370B2Sep 8, 2009

Gas-purged vacuum valve

NOVELLUS SYSTEMS INC6 citations71