Inventor
HELLER MATTHIAS
DE7 patents
⚠️ This page may combine multiple inventors who share the name “HELLER MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
4 patentsUS7166168B1Jan 23, 2007
Substrate-coating system and an associated substrate-heating method
ZEISS CARL SMT AG10 citations78
US6863398B2Mar 8, 2005
Method and coating system for coating substrates for optical components
ZEISS CARL SMT AG8 citations71
US6825976B2Nov 30, 2004
Antireflection coating for ultraviolet light
ZEISS CARL SMT AG9 citations71
US7093937B2Aug 22, 2006
Optical component and coating system for coating substrates for optical components
ZEISS CARL SMT AG2 citations60