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Inventor
CHANG YING-YI
TW
2 patents
⚠️ This page may combine multiple inventors who share the name “CHANG YING-YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
1 patent
US7726953B2
Jun 1, 2010
Pump ring
UNITED MICROELECTRONICS CORP
1 citations
35
LAI CHIEN-HSIN
1 patent
US8105648B2
Jan 31, 2012
Method for operating a chemical deposition chamber
LAI CHIEN-HSIN
0 citations
34