Inventor
YOSHITAKA HIKARU
JP4 patents
⚠️ This page may combine multiple inventors who share the name “YOSHITAKA HIKARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS7481886B2Jan 27, 2009
Plasma process system and plasma process method
TOKYO ELECTRON LTD63 citations97
US6764939B1Jul 20, 2004
Semiconductor device and method of manufacturing the same
TOKYO ELECTRON LTD39 citations88
US6620739B1Sep 16, 2003
Method of manufacturing semiconductor device
TOKYO ELECTRON LTD6 citations61