Inventor
ISOGAI SATORU
JP5 patents
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ISOGAI SATORU
2 patentsUS8581315B2Nov 12, 2013
Semiconductor device having cylindrical lower electrode of capacitor and manufacturing method thereof
ISOGAI SATORU2 citations56
US8138536B2Mar 20, 2012
Semiconductor device having cylindrical lower electrode of capacitor and manufacturing method thereof
ISOGAI SATORU0 citations45