Inventor
SCHATTENBURG MARK
US7 patents
⚠️ This page may combine multiple inventors who share the name “SCHATTENBURG MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MASSACHUSETTS INST TECHNOLOGY
4 patentsUS6882477B1Apr 19, 2005
Method and system for interference lithography utilizing phase-locked scanning beams
MASSACHUSETTS INST TECHNOLOGY178 citations96
US5809103ASep 15, 1998
X-ray lithography masking
MASSACHUSETTS INST TECHNOLOGY28 citations92
US7492989B2Feb 17, 2009
Hybrid transmission-reflection grating
MASSACHUSETTS INST TECHNOLOGY4 citations53
US11879170B2Jan 23, 2024
Stress patterning systems and methods for manufacturing free-form deformations in thin substrates
MASSACHUSETTS INST TECHNOLOGY0 citations51
Lithoptek LLC
3 patentsUS10108096B2Oct 23, 2018
Apparatus and method for using scanning light beam for film or surface modification
Lithoptek LLC2 citations67
US10503083B2Dec 10, 2019
Apparatus and method for using scanning light beam for film or surface modification
Lithoptek LLC1 citations56
US10145672B2Dec 4, 2018
Detection of position, orientation and scale of work pieces using retroreflective surfaces
Lithoptek LLC0 citations46