Inventor

LEE MARK HYUN

US2 patents

Patents

2 patents

US10410918B2Sep 10, 2019

Enhanced cobalt agglomeration resistance and gap-fill performance by ruthenium doping

APPLIED MATERIALS INC17 citations92

US11043415B2Jun 22, 2021

Enhanced cobalt agglomeration resistance and gap-fill performance by ruthenium doping

APPLIED MATERIALS INC0 citations60