Inventor

KIM SUWOONG

KR4 patents

Patents

4 patents

US11567409B2Jan 31, 2023

Polymers, underlayer coating compositions comprising the same, and patterning methods

ROHM & HAAS ELECT MATERIALS KOREA LTD0 citations59

US12393118B2Aug 19, 2025

Composition for photoresist underlayer

ROHM & HAAS ELECT MATERIALS KOREA LTD0 citations57

US12055854B2Aug 6, 2024

Coating composition for photoresist underlayer

ROHM & HAAS ELECT MATERIALS KOREA LTD0 citations56

US12228858B2Feb 18, 2025

Coating composition for forming resist underlayer film for EUV lithography process

ROHM & HAAS ELECT MATERIALS KOREA LTD0 citations47