Inventor
LIM YIN WEI
SG3 patents
Patents
3 patentsUS12469683B2Nov 11, 2025
Water vapor plasma to enhance surface hydrophilicity
APPLIED MATERIALS INC0 citations55
US12588533B2Mar 24, 2026
Grain structure engineering for metal gapfill materials
APPLIED MATERIALS INC0 citations47
US12518367B2Jan 6, 2026
Defect classification of processed wafers
APPLIED MATERIALS INC0 citations35