Inventor

ODAKA SEIICHI

JP5 patents

Patents

5 patents

US5952676ASep 14, 1999

Liquid crystal device and method for manufacturing same with spacers formed by photolithography

SEMICONDUCTOR ENERGY LAB366 citations98

US4950624AAug 21, 1990

Method of depositing films using photo-CVD with chamber plasma cleaning

SEMICONDUCTOR ENERGY LAB356 citations97

US5963288AOct 5, 1999

Liquid crystal device having sealant and spacers made from the same material

SEMICONDUCTOR ENERGY LAB42 citations95

US4874461AOct 17, 1989

Method for manufacturing liquid crystal device with spacers formed by photolithography

SEMICONDUCTOR ENERGY LAB112 citations95

US4949004AAug 14, 1990

Gas discharge lamp having temperature controlled, liquid reservoir for liquified portion of gas

SEMICONDUCTOR ENERGY LAB10 citations73