Inventor

CHEN JENNMING

US2 patents

⚠️ This page may combine multiple inventors who share the name “CHEN JENNMING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

1 patent

US5771094AJun 23, 1998

Film measurement system with improved calibration

KLA TENCOR CORP180 citations97

TENCOR INSTRUMENTS

1 patent

US5581350ADec 3, 1996

Method and system for calibrating an ellipsometer

TENCOR INSTRUMENTS162 citations94