Inventor
HAHM JIN-HWAN
KR3 patents
Patents
3 patentsUS6607954B2Aug 19, 2003
Methods of fabricating cylinder-type capacitors for semiconductor devices using a hard mask and a mold layer
SAMSUNG ELECTRONICS CO LTD20 citations91
US5932492AAug 3, 1999
Methods for forming alumina masking
SAMSUNG ELECTRONICS CO LTD16 citations71
US6143654ANov 7, 2000
Method of forming tungsten pattern for a semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations60