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Inventor
SONG WEI JI
CN
2 patents
Patents
2 patents
US7084054B2
Aug 1, 2006
Method for making an opening for electrical contact by etch back profile control
SEMICONDUCTOR MFG INT SHANGHAI
2 citations
54
US7655561B2
Feb 2, 2010
Method for making an opening for electrical contact by etch back profile control
SEMICONDUCTOR MFG INT SHANGHAI
0 citations
44